Related-Party Activity (Tables)

3 Months Ended

Mar. 30, 2014

Related Party Transactions [Abstract]

Schedule of Transactions with Related Parties

Transactions with these related parties were as follows (in thousands):

	Thirteen Weeks Ended
Sales to Related Parties	March 30, 2014		March 31, 2013
Product sales:
Applied Materials, Inc.	$	959	$	3,492
Oregon Health & Science University	130		129
Total product sales to related parties	1,089		3,621
Service sales:
Applied Materials, Inc.	168		133
Lattice Semiconductor Corporation	3		3
Cascade Microtech, Inc.	8		8
Oregon Health & Science University	82		9
Total service sales to related parties	261		153
Total sales to related parties	$	1,350	$	3,774
Purchases from Related Parties
TMC BV	$	408	$	25
Oregon Health & Science University	39		—
Total purchases from related parties	$	447	$	25

Schedule of Amounts Due From (To) Related Parties

Amounts due from (to) related parties were as follows (in thousands):

	March 30, 2014
Applied Materials, Inc.	$	990
Cascade Microtech, Inc.	8
Oregon Health & Science University	(28		)
TMC BV	(290		)
Due from related parties, net	$	680