Exhibit 23.1

Consent of Independent Registered Public Accounting Firm

The Board of Directors

FEI Company:

We consent to the incorporation by reference in the registration statement (Nos. 333-185187, 333-176955 333-162940, 333-156239, 333-149741, 333-136473, 333-128923, 333-115840, 333-110264, 333-44954, 333-92631, 333-92629, 333-57331, 333-32911, and 333-08863) on Form S-8 of FEI Company of our reports dated February 21, 2014, with respect to the consolidated balance sheets of FEI Company as of December 31, 2013 and 2012, and the related consolidated statements of operations, comprehensive income, shareholders’ equity, and cash flows for each of the years in the three year period ended December 31, 2013, and the effectiveness of internal control over financial reporting as of December 31, 2013, which reports appears in the December 31, 2013 annual report on Form 10-K of FEI Company.

/s/ KPMG LLP

Portland, Oregon

February 21, 2014