Related-Party Activity - Schedule of Amounts Due From (To) Related Parties (Details) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2013
Related Party Transaction [Line Items]
Due from (to) related party	$ (348)
Applied Materials [Member]
Related Party Transaction [Line Items]
Due from (to) related party	46
Cascade Microtech [Member]
Related Party Transaction [Line Items]
Due from (to) related party	8
Oregon Health and Science University [Member]
Related Party Transaction [Line Items]
Due from (to) related party	1
TMC BV [Member]
Related Party Transaction [Line Items]
Due from (to) related party	$ (403)

Receivables to be collected from (obligations owed to) related parties, net as of the balance sheet date where one party can exercise control or significant influence over another party; including affiliates, owners or officers and their immediate families, pension trusts, and so forth.

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 235

-SubTopic 10

-Section S99

-Paragraph 1

-Subparagraph (SX 210.4-08.(k)(1))

-URI http://asc.fasb.org/extlink&oid=26873400&loc=d3e23780-122690

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 850

-SubTopic 10

-Section 50

-Paragraph 1

-Subparagraph (d)

-URI http://asc.fasb.org/extlink&oid=6457730&loc=d3e39549-107864

Reference 3: http://www.xbrl.org/2003/role/presentationRef

-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 08

-Paragraph k

-Subparagraph 1

-Article 4

Name:	us-gaap_RelatedPartyTransactionDueFromToRelatedParty
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant