Related-Party Activity (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2013	Dec. 31, 2012	Dec. 31, 2011
Related Party Transaction [Line Items]
Product sales to related parties	$ 5,216	$ 985	$ 3,716
Service sales to related parties	849	587	498
Total sales to related parties	6,065	1,572	4,214
Purchases from related parties	933	127	110
Applied Materials [Member]
Related Party Transaction [Line Items]
Product sales to related parties	4,656	981	3,594
Service sales to related parties	719	554	459
Lattice Semiconductor [Member]
Related Party Transaction [Line Items]
Product sales to related parties	5	0	122
Service sales to related parties	12	0	0
Cascade Microtech [Member]
Related Party Transaction [Line Items]
Product sales to related parties	0	4	0
Service sales to related parties	33	33	39
Purchases from related parties	0	0	1
Oregon Health and Science University [Member]
Related Party Transaction [Line Items]
Product sales to related parties	555	0	0
Service sales to related parties	85	0	0
Purchases from related parties	353	0	0
TMC BV [Member]
Related Party Transaction [Line Items]
Purchases from related parties	$ 580	$ 127	$ 109