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Property, Plant and Equipment (Details) (USD $)
In Thousands, unless otherwise specified
Dec. 31, 2013
Dec. 31, 2012
Property, Plant and Equipment, Net, by Type [Abstract]    
Gross property, plant and equipment $ 283,234 $ 231,432
Accumulated depreciation (125,405) (121,560)
Total property, plant and equipment, net 157,829 109,872
Land [Member]
   
Property, Plant and Equipment, Net, by Type [Abstract]    
Gross property, plant and equipment 25,535 7,806
Building and Building Improvements [Member]
   
Property, Plant and Equipment, Net, by Type [Abstract]    
Gross property, plant and equipment 36,778 21,645
Leasehold Improvements [Member]
   
Property, Plant and Equipment, Net, by Type [Abstract]    
Gross property, plant and equipment 23,948 16,503
Machinery and Equipment [Member]
   
Property, Plant and Equipment, Net, by Type [Abstract]    
Gross property, plant and equipment 103,180 108,982
Demonstration Systems [Member]
   
Property, Plant and Equipment, Net, by Type [Abstract]    
Gross property, plant and equipment 44,700 29,986
Other Fixed Assets [Member]
   
Property, Plant and Equipment, Net, by Type [Abstract]    
Gross property, plant and equipment $ 49,093 $ 46,510