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Related-Party Activity (Tables)
 12 Months Ended
Dec. 31, 2013
Related Party Transactions [Abstract]  
Schedule of Transactions with Related Parties
Transactions with these related parties were as follows (in thousands):
 
Year Ended
Sales to Related Parties
2013
 
2012
 
2011
Product sales:
 
 
 
 
 
Applied Materials, Inc.
$
4,656

 
$
981

 
$
3,594

Lattice Semiconductor Corporation
5

 
—

 
122

Cascade Microtech, Inc.
—

 
4

 
—

Oregon Health and Science University
555

 
—

 
—

Total product sales to related parties
5,216

 
985

 
3,716

Service sales:
 
 
 
 
 
Applied Materials, Inc.
719

 
554

 
459

Lattice Semiconductor Corporation
12

 
—

 
—

Cascade Microtech, Inc.
33

 
33

 
39

Oregon Health and Science University
85

 
—

 
—

Total service sales to related parties
849

 
587

 
498

Total sales to related parties
$
6,065

 
$
1,572

 
$
4,214

Purchases from Related Parties
 
 
 
 
 
TMC BV
$
580

 
$
127

 
$
109

Cascade Microtech, Inc.
—

 
—

 
1

Oregon Health and Science University
353

 
—

 
—

Total purchases from related parties
$
933

 
$
127

 
$
110
Schedule of Amounts Due From (To) Related Parties
Amounts due from (to) related parties were as follows (in thousands):
 
December 31,
2013
Applied Materials, Inc.
$
46

Cascade Microtech, Inc.
8

Oregon Health and Science University
1

TMC BV
(403
)
Due to related parties, net
$
(348
)