Related-Party Activity (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended		6 Months Ended
	Jun. 30, 2013	Jul. 01, 2012	Jun. 30, 2013	Jul. 01, 2012
Related Party Transaction [Line Items]
Product sales to related parties	$ 229	$ 89	$ 3,850	$ 137
Service sales to related parties	215	135	368	278
Total sales to related parties	444	224	4,218	415
Purchases from related parties	198	38	223	65
Applied Materials [Member]
Related Party Transaction [Line Items]
Product sales to related parties	99	85	3,591	133
Service sales to related parties	197	127	330	262
Lattice Semiconductor [Member]
Related Party Transaction [Line Items]
Product sales to related parties	4	0	4	0
Service sales to related parties	3	0	6	0
Cascade Microtech [Member]
Related Party Transaction [Line Items]
Product sales to related parties	0	4	0	4
Service sales to related parties	8	8	16	16
Oregon Health and Science University [Member]
Related Party Transaction [Line Items]
Product sales to related parties	126	0	255	0
Service sales to related parties	7	0	16	0
Purchases from related parties	175	0	175	0
TMC BV [Member]
Related Party Transaction [Line Items]
Purchases from related parties	$ 23	$ 38	$ 48	$ 65