Related-Party Activity - Schedule of Amounts Due From (To) Related Parties (Details) (USD $) In Thousands, unless otherwise specified	Mar. 31, 2013
Related Party Transaction [Line Items]
Due from (to) related party	$ 10,395
Applied Materials [Member]
Related Party Transaction [Line Items]
Due from (to) related party	3,551
Cascade Microtech [Member]
Related Party Transaction [Line Items]
Due from (to) related party	8
Oregon Health and Science University [Member]
Related Party Transaction [Line Items]
Due from (to) related party	6,963
TMC BV [Member]
Related Party Transaction [Line Items]
Due from (to) related party	$ (127)