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Related-Party Activity (Tables)
 12 Months Ended
Dec. 31, 2012
Related Party Transactions [Abstract]  
Schedule of Transactions with Related Parties
Transactions with these related parties were as follows (in thousands):
 
Year Ended December 31,
Sales to Related Parties
2012
 
2011
 
2010
Product sales:
 
 
 
 
 
Applied Materials, Inc.
$
981

 
$
3,594

 
$
343

Lattice Semiconductor Corporation
—

 
122

 
—

Cascade Microtech, Inc.
4

 
—

 
—

Total product sales to related parties
985

 
3,716

 
343

Service sales:
 
 
 
 
 
Applied Materials, Inc.
554

 
459

 
390

Cascade Microtech, Inc.
33

 
39

 
31

Total service sales to related parties
587

 
498

 
421

Total sales to related parties
$
1,572

 
$
4,214

 
$
764

Purchases from Related Parties
 
 
 
 
 
TMC BV
$
127

 
$
109

 
$
77

Cascade Microtech, Inc.
—

 
1

 
—

Total purchases from related parties
$
127

 
$
110

 
$
77
Schedule of Amounts Due From (To) Related Parties
Amounts due from (to) related parties were as follows (in thousands):
 
December 31,
2012
Applied Materials, Inc.
$
948

Cascade Microtech, Inc.
8

TMC BV
(144
)
Due from related parties, net
$
812