Related-Party Activity (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended		6 Months Ended
	Jul. 01, 2012	Jul. 03, 2011	Jul. 01, 2012	Jul. 03, 2011
Related Party Transaction [Line Items]
Product sales to related parties	$ 89	$ 157	$ 137	$ 1,125
Service sales to related parties	135	114	278	238
Total sales to related parties	224	271	415	1,363
Purchases from related parties	38	5	65	29
Applied Materials [Member]
Related Party Transaction [Line Items]
Product sales to related parties	85	157	133	1,125
Service sales to related parties	127	106	262	220
Cascade Microtech [Member]
Related Party Transaction [Line Items]
Product sales to related parties	4	0	4	0
Service sales to related parties	8	8	16	18
Purchases from related parties	0	1	0	1
TMC BV [Member]
Related Party Transaction [Line Items]
Purchases from related parties	$ 38	$ 4	$ 65	$ 28