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Related-Party Activity - Schedule of Amounts Due From (To) Related Parties (Details) (USD $) In Thousands, unless otherwise specified	Apr. 01, 2012
Related Party Transaction [Line Items]
Due from (to) related party	$ 239
Applied Materials [Member]
Related Party Transaction [Line Items]
Due from (to) related party	240
Cascade Microtech [Member]
Related Party Transaction [Line Items]
Due from (to) related party	8
TMC BV [Member]
Related Party Transaction [Line Items]
Due from (to) related party	$ (9)

Receivables to be collected from (obligations owed to) related parties, net as of the balance sheet date where one party can exercise control or significant influence over another party; including affiliates, owners or officers and their immediate families, pension trusts, and so forth.

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