Related-Party Activity (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended
	Apr. 01, 2012	Apr. 03, 2011
Related Party Transaction [Line Items]
Product sales to related parties	$ 48	$ 968
Service sales to related parties	143	124
Total sales to related parties	191	1,092
Purchases from related parties	27	24
Applied Materials [Member]
Related Party Transaction [Line Items]
Product sales to related parties	48	968
Service sales to related parties	135	114
Lattice Semiconductor [Member]
Related Party Transaction [Line Items]
Product sales to related parties	0	0
Cascade Microtech [Member]
Related Party Transaction [Line Items]
Service sales to related parties	8	10
Purchases from related parties	0	0
TMC BV [Member]
Related Party Transaction [Line Items]
Purchases from related parties	$ 27	$ 24