Related-Party Activity - Schedule of Amounts Due From (To) Related Parties (Details) (USD $) In Thousands, unless otherwise specified	Dec. 31, 2011
Related Party Transaction [Line Items]
Due from (to) related party	$ (286)
Applied Materials [Member]
Related Party Transaction [Line Items]
Due from (to) related party	52
Cascade Microtech [Member]
Related Party Transaction [Line Items]
Due from (to) related party	13
Lattice Semiconductor [Member]
Related Party Transaction [Line Items]
Due from (to) related party	121
Schneeberger [Member]
Related Party Transaction [Line Items]
Due from (to) related party	(368)
TMC BV [Member]
Related Party Transaction [Line Items]
Due from (to) related party	$ (104)