Related-Party Activity (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 31, 2011	Dec. 31, 2010	Dec. 31, 2009
Related Party Transaction [Line Items]
Product sales to related parties	$ 3,716	$ 343	$ 578
Service sales to related parties	498	421	280
Total sales to related parties	4,214	764	858
Purchases from related parties	2,595	3,035	3,462
Applied Materials [Member]
Related Party Transaction [Line Items]
Product sales to related parties	3,594	343	578
Service sales to related parties	459	390	266
Lattice Semiconductor [Member]
Related Party Transaction [Line Items]
Product sales to related parties	122	0	0
Cascade Microtech [Member]
Related Party Transaction [Line Items]
Service sales to related parties	39	31	14
Purchases from related parties	1	0	12
Schneeberger [Member]
Related Party Transaction [Line Items]
Purchases from related parties	2,485	2,958	3,223
TMC BV [Member]
Related Party Transaction [Line Items]
Purchases from related parties	$ 109	$ 77	$ 227