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Subsequent Event	12 Months Ended
Subsequent Event	Dec. 31, 2011
Subsequent Events [Abstract]
Subsequent Event	SUBSEQUENT EVENT On January 9, 2012, we acquired 100% of the outstanding shares of ASPEX Corporation, a manufacturer of durable scanning electron microscopes for industrial applications. The total purchase price of the acquisition was $30.5 million. As of the date of this filing, the allocation of the purchase price is in process and, accordingly, the applicable disclosures cannot be made. Refer to Note 9 of the Notes to the Consolidated Financial Statements for additional information.