Related-Party Activity

12 Months Ended

Dec. 31, 2011

Related Party Transactions [Abstract]

Related-Party Activity

RELATED-PARTY ACTIVITY

Related parties with which we had transactions during 2011 were as follows:

• one of the members of our Board of Directors is a director of Applied Materials, Inc.;

• one of the members of our Board of Directors serves on the Board of Directors of Lattice Semiconductor Corporation;

• our Chief Financial Officer is on the Board of Directors of Cascade Microtech, Inc.;

• one of our named executive officers serves on the Board of Directors of Schneeberger, Inc.; and

• one of the members of our Board of Directors serves on the Supervisory Board of TMC BV.

Transactions with these related parties were as follows (in thousands):

	Year Ended December 31,
Sales to Related Parties	2011		2010		2009
Product sales:
Applied Materials, Inc.	$	3,594	$	343	$	578
Lattice Semiconductor Corporation	122		—		—
Total product sales to related parties	3,716		343		578
Service sales:
Applied Materials, Inc.	459		390		266
Cascade Microtech, Inc.	39		31		14
Total service sales to related parties	498		421		280
Total sales to related parties	$	4,214	$	764	$	858
Purchases from Related Parties
Schneeberger, Inc.	$	2,485	$	2,958	$	3,223
TMC BV	109		77		227
Cascade Microtech, Inc.	1		—		12
Total purchases from related parties	$	2,595	$	3,035	$	3,462

Amounts due from (to) related parties were as follows (in thousands):

	December 31, 2011
Applied Materials, Inc.	$	52
Cascade Microtech, Inc.	13
Lattice Semiconductor Corporation	121
Schneeberger, Inc.	(368		)
TMC BV	(104		)
Due to related parties, net	$	(286	)