Related Party Transactions (Details) (KLA-Tencor Corporation ("KLA-Tencor"), USD $) In Millions, unless otherwise specified	3 Months Ended
Oct. 01, 2011	Sep. 29, 2012 item
KLA-Tencor Corporation ("KLA-Tencor")
Transactions with Related Party
Sales:	$ 2.1
Accounts Receivable:	$ 0.9
Board of Directors in Common
Number of the Company's board members that are also on the Board of related party entity		1

The aggregate amount of receivables to be collected from related parties where one party can exercise control or significant influence over another party; including affiliates, owners or officers and their immediate families, pension trusts, and so forth, at the financial statement date. which are usually due within one year (or one business cycle).

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Amount of revenue, fees and commissions earned from transactions between (a) a parent company and its subsidiaries; (b) subsidiaries of a common parent; (c) an entity and trusts for the benefit of employees, for example, but not limited to, pension and profit-sharing trusts that are managed by or under the trusteeship of the entity's management; (d) an entity and its principal, owners, management, or members of their immediate families; and (e) affiliates.

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