The following is a list of Ultratech Stepper Inc.'s subsidiaries including their jurisdiction of incorporation as of December 31, 2001:

Subsidiaries		Jurisdiction of incorporation
Integrated Lithography Systems, Inc.		Korea
Integrated Semiconductor Solutions, Ltd.		United Kingdom
Ultratech Stepper International, Inc.		State of Delaware, USA
Ultratech Stepper UK Limited		United Kingdom
Ultratech Stepper Foreign Sales Corp.		Barbados
Ultratech Kabushiki Kaisha		Japan
Ultratech Stepper East, Inc. (formerly UTS Acquisition Sub, Inc., Ultratech Capital, Inc. and Ultratech Stepper Capital, Inc.)		State of Delaware, USA
Ultratech Stepper (Thailand) Co. LTD.		Thailand
U.S. Advanced Lithography LLC		State of Delaware, USA
Ultratech Stepper (Shanghai) Co., Ltd.		People's Republic of China