X0306 4 2013-04-25 0 0000906193 KEY TECHNOLOGY INC KTEC 0001253101 SIEGAL JEFFREY T 150 AVERY STREET WALLA WALLA WA 99362 0 1 0 0 Vice President & CFO Common Stock 2013-04-25 4 A 0 5259 0.0 A 5259 D Common Stock 2013-04-25 4 A 0 10678 0.0 A 15937 D Represents restricted stock award, the restrictions on which shall lapse as to 1,753 shares on September 30, 2013, 1,753 shares on September 30, 2014 and 1,753 shares on September 30, 2015 based on continued employment. Represents restricted stock award, the restrictions on which shall lapse on September 30, 2015 based on the achievement of certain performance criteria measured over a three year period ending September 30, 2015 and continued employment. /s/ Jeffrey T. Siegal 2013-04-25