X0303 4 2009-10-01 0 0000906193 KEY TECHNOLOGY INC KTEC 0001296321 BOUTSIKARIS JOHN C C/O KEY TECHNOLOGY, INC. 150 AVERY STREET WALLA WALLA WA 99362 0 1 0 0 SVP GLOBAL SALES & AFTERMARKET Common Stock 2009-10-01 4 F 0 181 11.03 D 17927 D Common Stock 2009-10-02 4 A 0 12710 10.75 A 30637 D Common Stock 2009-10-02 4 A 0 40672 10.75 A 71309 D Delivery of shares to Company to satisfy tax withholding obligations in connection with lapse of restriction on 683 shares of restricted stock. Represents restricted stock award the restrictions on which shall lapse on December 15, 2010 based on the achievement of certain performance criteria for the year ended September 30, 2010 and continued employement. Represents restricted stock award the restrictions on which will lapse as to 10,168 shares on October 1, 2010, 10,168 shares on October 1, 2011, and 20,336 shares on October 1, 2012 subject to continued employment. /s/ John C. Boutsikaris by Michele R. Walters, Attorney-in-Fact 2009-10-05