X0303 4 2009-10-02 0 0000906193 KEY TECHNOLOGY INC KTEC 0001253100 EHREN JOHN J C/O KEY TECHNOLOGY, INC. 150 AVERY STREET WALLA WALLA WA 99362 0 1 0 0 CFO & SVP Common Stock 2009-10-02 4 A 0 5349 10.75 A 12304 D Common Stock 2009-10-02 4 A 0 42791 10.75 A 55095 D Represents restricted stock award the restictions on which shall lapse on December 15, 2010 based on the achievement of certain performance criteria for the year ended September 30, 2010 and continued employment. Represents restricted stock award the restictions on which will lapse as to 10,698 shares on October 1, 2010, 10,698 shares on October 1, 2011, and 21,395 shares on October 1, 2012 subject to contiued employment. /s/ John J. Ehren 2009-10-05