Exhibit 21

List of Subsidiaries, as of December 5, 2014

Key Technology, Inc., an Oregon corporation (the Registrant)

· Key Technology Holdings USA LLC (Oregon)

· Suplusco Holding B.V. (the Netherlands)

· Key Technology B.V. (the Netherlands)

· Visys N.V. (Belgium)

· Key Technology Australia Pty Ltd. (Australia)

· Productos Key Mexicana S. de R.L. de C.V. (Mexico)

· Administracion Key Mexicana S. de R.L. de C.V. (Mexico)

· Key Technology (Shanghai) Trading Co. Ltd. (China)