X0304 4 2012-02-29 0 0000897067 CYMER INC CYMI 0001338009 Brown Edward J Jr 17075 THORNMINT COURT SAN DIEGO CA 92127 0 1 0 0 President/COO Performance Shares 0.0 2012-02-29 4 A 0 8022.0 0.0 A 2012-02-29 Common Stock 8022.0 106096.0 D Restricted Stock Unit 0.0 2012-02-29 4 A 0 16828.0 0.0 A 2013-03-01 Common Stock 16828.0 56939.0 D Represents performance restricted stock units, granted to the reporting person on 2/5/2009, that vested on 2/29/12 based upon satisfaction of certain predetermined performance metrics for a three year performance period 2009 through 2011. There is no expiration date for PSU's. These shares represent stock units granted under the Cymer 2011 Equity Incentive Plan. Each stock unit represents the right to receive, upon vesting, one share of CYMI common stock. These units are scheduled to vest in 3 equal annual installments beginning 3/1/13. There is no expiration date for RSU's By: Cathy Wingenbach, Attorney-in-Fact For: Edward J. Brown, Jr. 2012-03-02