Stockholders' Equity, Stock-based Compensation Expense (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2023	Dec. 31, 2022	Dec. 31, 2021
Stock-Based Compensation [Abstract]
Stock-based compensation expense	$ 105,809	$ 100,264	$ 120,678
Cost of Sales [Member]
Stock-Based Compensation [Abstract]
Stock-based compensation expense	499	533	456
Research, Development and Patent [Member]
Stock-Based Compensation [Abstract]
Stock-based compensation expense	77,826	73,704	87,522
Selling, General and Administrative [Member]
Stock-Based Compensation [Abstract]
Stock-based compensation expense	$ 27,484	$ 26,027	$ 32,700