Summary of Transactions with Lam (Detail) (Lam Research Corporation, USD $) In Thousands, unless otherwise specified	12 Months Ended
Dec. 31, 2014	Dec. 31, 2012
Lam Research Corporation
Related Party Transaction [Line Items]
Equipment sold to Lam	$ 388	$ 21
Due from Lam	$ 3

For an unclassified balance sheet, amount of receivables arising from transactions with related parties.

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Amount of revenue, fees and commissions earned from transactions between (a) a parent company and its subsidiaries; (b) subsidiaries of a common parent; (c) an entity and trusts for the benefit of employees, for example, but not limited to, pension and profit-sharing trusts that are managed by or under the trusteeship of the entity's management; (d) an entity and its principal, owners, management, or members of their immediate families; and (e) affiliates.

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