<SEC-DOCUMENT>0001104659-16-095947-index.html : 20160211
<SEC-HEADER>0001104659-16-095947.hdr.sgml : 20160211
<ACCEPTANCE-DATETIME>20160211162449
ACCESSION NUMBER:		0001104659-16-095947
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20160210
FILED AS OF DATE:		20160211
DATE AS OF CHANGE:		20160211

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			CASCADE MICROTECH INC
		CENTRAL INDEX KEY:			0000864559
		STANDARD INDUSTRIAL CLASSIFICATION:	INSTRUMENTS FOR MEAS & TESTING OF ELECTRICITY & ELEC SIGNALS [3825]
		IRS NUMBER:				000000000
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		9100 SW GEMINI DRIVE
		CITY:			BEAVERTON
		STATE:			OR
		ZIP:			97008
		BUSINESS PHONE:		5036011000

	MAIL ADDRESS:	
		STREET 1:		9100 SW GEMINI DRIVE
		CITY:			BEAVERTON
		STATE:			OR
		ZIP:			97008

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			DELAFIELD JOHN D
		CENTRAL INDEX KEY:			0001400003

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-51072
		FILM NUMBER:		161411849

	MAIL ADDRESS:	
		STREET 1:		3633 136TH PLACE SE, STE 110
		CITY:			BELLEVUE
		STATE:			WA
		ZIP:			98006
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>a4.xml
<DESCRIPTION>4
<TEXT>
Document 1 - file: a4.html

Document 1 - RAW XML: a4.xml

</DOCUMENT>
</SEC-DOCUMENT>