X0306 4 2016-02-03 0 0000864559 CASCADE MICROTECH INC CSCD 0001499183 Raim Ellen 9100 SW GEMINI DRIVE BEAVERTON OR 97008 0 1 0 0 VP, Human Resources Common Stock 2016-02-03 4 M 0 191 0.00 A 24793 D Common Stock 2016-02-03 4 F 0 80 15.2800 D 24713 D Restricted Stock Units 0.00 2016-02-03 4 M 0 191 0.0 D 2016-02-03 Common Stock 191 0 D These Restricted Stock Units do not carry a conversion price. Per the terms of the agreement and using aggregate market value sufficient to pay applicable taxes, shares were withheld and surrendered to the Company to satisfy tax withholding obligation in connection with the vesting of Restricted Stock Units. Each Restricted Stock Unit represents a right to receive one share of Cascade Microtech Inc. Common Stock upon vesting. Restricted Stock Units vest annually on the anniversary date of the award in five annual installments; 12.5% the first and fifth tranches, and 25% the second, third, and fourth tranches. Restricted Stock Units have no expiration date. James Nias, by Power of Attorney 2016-02-04