X0306 4 2014-11-07 0 0000864559 CASCADE MICROTECH INC CSCD 0001505335 Mahon Steven Scott CASCADE MICROTECH INC. 2430 NW 206TH AVENUE BEAVERTON OR 97006 0 1 0 0 Vice President, Operations Common Stock 2014-11-07 4 M 0 7500 0.00 A 35035 D Common Stock 2014-11-07 4 F 0 2727 12.4600 D 32308 D Common Stock 2014-11-07 4 M 0 1725 0.00 A 34033 D Common Stock 2014-11-07 4 F 0 628 12.4600 D 33405 D Restricted Stock Units 0.00 2014-11-07 4 M 0 7500 0.0 D 2014-11-07 Common Stock 7500 0 D Restricted Stock Units 0.00 2014-11-07 4 M 0 1725 0.00 D 2014-11-07 Common Stock 1725 3450 D These Restricted Stock Units do not carry a conversion price. Holdings include 1,196 shares of common stock acquired on April 30, 2014 and 1,159 shares of common stock acquired on October 31, 2014 pursuant to the Company's 2013 Employee Stock Purchase Plan Per the terms of the agreement and using aggregate market value sufficient to pay applicable taxes, shares were withheld and surrendered to the Company to satisfy tax withholding obligation in connection with the vesting of Restricted Stock Units. Each Restricted Stock Unit represents a right to receive one share of Cascade Microtech Inc. Common Stock upon vesting. Restricted Stock Units cliff vest annually on the anniversary date of the award in four annual installments. Restricted Stock Units have no expiration date. Amy Swinhoe by Power of Attorney 2014-11-12