X0306 4 2013-11-12 0 0000864559 CASCADE MICROTECH INC CSCD 0001488471 Killian Jeffrey A 9100 SW GEMINI DRIVE BEAVERTON OR 97008 0 1 0 0 Chief Financial Officer Common Stock 56712 D Restricted Stock Units 0.00 2013-11-12 4 A 0 5000 0.0 A Common Stock 5000 5000 D Stock Option 10.88 2013-11-12 4 A 0 21000 10.88 A 2023-11-12 Common Stock 21000 21000 D These Restricted Stock Units do not carry a conversion price. Each Restricted Stock Unit represents a right to receive one share of Cascade Microtech Inc. Common Stock upon vesting. Provided that the individual continues to hold the status of Employee, then Restricted Stock Units cliff vest annually in four equal annual installments on the anniversary date of the grant. Restricted Stock Units have no expiration date. Provided that the individual continues to hold the status of Employee, then Stock Options cliff vest and become exercisable in four equal annual installments on the anniversary date of the grant. Madelaine Salas by Power of Attorney 2013-11-14