X0306 4 2013-11-12 0 0000864559 CASCADE MICROTECH INC CSCD 0001185711 SPIVEY WILLIAM 9100 SW GEMINI DRIVE BEAVERTON OR 97008 1 0 0 0 Restricted Stock Unit 2013-11-12 4 M 0 1666 0 A 122798 D Restricted Stock Unit 0 2013-11-12 4 M 0 1666 0 D 2013-11-12 Common Stock 1666 0 D Each Restricted Stock Unit represents a right to receive one share of Cascade Microtech Inc. common stock upon vesting. Provided that the individual continues to hold the status of member of Board of Directors, then Restricted Stock Units cliff vest annually in three equal installments on the anniversary date of the grant. These units do not carry a conversion price. These units do not expire. Madelaine Salas, by Power of Attorney 2013-11-14