X0304 4 2011-08-16 0 0000864559 CASCADE MICROTECH INC CSCD 0001499183 Raim Ellen CACADE MICROTECH INC 2430 NW 206TH AVENUE BEAVERTON OR 97006 0 1 0 0 VP, Human Resources Common Stock 2011-08-16 4 M 0 7500 0.00 A 7500 D Common Stock 2011-08-16 4 F 0 2659 4.3199 D 4841 D Restricted Stock Units 0.00 2011-08-16 4 M 0 7500 0.0 D 2011-08-16 Common Stock 7500 22500 D Per the terms of the agreement and using aggregate market value sufficient to pay applicable taxes, shares were withheld and surrendered to the Company to satisfy tax withholding obligation in connection with the vesting of Restricted Stock Units. These Restricted Stock Units do not carry a conversion price. Each Restricted Stock Unit represents a right to receive one share of Cascade Microtech Inc. Common Stock upon vesting. Provided that the individual continues to hold the status of Employee, then Restricted Stock Units cliff vest annually on the anniversary date of the award in four equal annual installments beginning on August 16, 2011 Restricted Stock Units have no expiration date. Madelaine Salas, by Power of Attorney 2011-08-17