X0304 4 2011-08-13 0 0000864559 CASCADE MICROTECH INC CSCD 0001488471 Killian Jeffrey A CASCADE MICROTECH INC. 2430 NW 206TH AVENUE BEAVERTON OR 97006 0 1 0 0 Chief Financial Officer Common Stock 2011-08-13 4 M 0 2677 0.00 A 33276 D Common Stock 2011-08-13 4 F 0 949 4.25 D 32327 D Restricted Stock Units 0.00 2011-08-13 4 M 0 2677 0.0 D 2011-08-13 Common Stock 2677 2676 D These Restricted Stock Units do not carry a conversion price. Per the terms of the agreement and using aggregate market value sufficient to pay applicable taxes, shares were withheld and surrendered to the Company to satisfy tax withholding obligation in connection with the vesting of Restricted Stock Units. Each Restricted Stock Unit represents a right to receive one share of Cascade Microtech Inc. Common Stock upon vesting. Provided that the individual continues to hold the status of Employee, then Restricted Stock Units cliff vest on the anniversary date of the award in two equal annual installments beginning on August 13, 2011. Restricted Stock Units have no expiration date. Madelaine Salas by Power of Attorney 2011-08-16