X0304 4 2011-08-13 0 0000864559 CASCADE MICROTECH INC CSCD 0001435750 Harris Steven L 13900 NW SCIENCE PARK DRIVE PORTLAND OR 97229 0 1 0 0 Executive Vice President Common Stock 2011-08-13 4 M 0 3599 0.00 A 28757 D Common Stock 2011-08-13 4 F 0 1276 4.25 D 27481 D Restricted Stock Units 0.00 2011-08-13 4 M 0 3599 0.0 D 2011-08-13 Common Stock 3599 3599 D Per the terms of the agreement and using aggregate market value sufficient to pay applicable taxes, shares were withheld and surrendered to the Company to satisfy tax withholding obligation in connection with the vesting of Restricted Stock Units. These Restricted Stock Units do not carry a conversion price. Each Restricted Stock Unit represents a right to receive one share of Cascade Microtech Inc. Common Stock upon vesting. Provided that the individual continues to hold the status of Employee, then Restricted Stock Units cliff vest annually on the anniversary date of the award in two equal annual installments beginning on August 13, 2011 Restricted Stock Units have no expiration date. Madelaine Salas by Power of Attorney 2011-08-16