X0303 4 2011-07-06 0 0000864559 CASCADE MICROTECH INC CSCD 0001252039 BURGER MICHAEL D C/O ZILOG INC 532 RACE STREET SAN JOSE CA 95126 0 1 0 0 President and CEO Common Stock 2011-07-06 4 M 0 12500 0.00 A 17820 D Common Stock 2011-07-06 4 F 0 4432 5.81 D 13388 D Restricted Stock Units 0.00 2011-07-06 4 M 0 12500 0.0 D 2011-07-06 Common Stock 12500 57500 D These Restricted Stock Units do not carry a conversion price. Per the terms of the agreement and using aggregate market value sufficient to pay applicable taxes, shares were withheld and surrendered to the Company to satisfy tax withholding obligation in connection with the vesting of Restricted Stock Units. Each Restricted Stock Unit represents a right to receive one share of Cascade Microtech Inc. Common Stock upon vesting. Provided that the individual continues to hold the status of Employee, then 12,500 Restricted Stock Units cliff vest on the anniversary date of the award. Restricted Stock Units have no expiration date. Madelaine Salas, by power of attorney 2011-07-07