X0203 3 2008-08-12 0 0000864559 CASCADE MICROTECH INC CSCD 0001443087 Nambiar Anand CASCADE MICROTECH INC. 2430 NW 206TH AVENUE BEAVERTON OR 97006 0 1 0 0 Vice President of Operations Restricted Stock Unit 0 Common Stock 30000 D Provided that the individual continues to hold the status of employee, then 30,000 Restricted Stock Units cliff vest annually over four years on the anniversary date of the grant. 7,500 Restricted Stock Units cliff vesting on each of the following: April 21, 2009, April 21, 2010, April 21, 2011 and April 21, 2012. Restricted Stock Units carry no expiration date. Madelaine Salas by Power of Attorney 2008-08-15