X0202 4 2008-02-08 0 0000864559 CASCADE MICROTECH INC CSCD 0001392919 Damkroger Willis D 2430 NW 206TH AVENUE BEAVERTON OR 97006 0 1 0 0 Vp/GM Pyramid Products Div. Common Stock 2008-02-08 4 A 0 2870 0.00 A 24914 D Provided that the individual continues to hold the status of employee, Restricted Stock Units cliff vest in four equal annual installments beginning February 8, 2009. These Restricted Stock Units carry no conversion price. Holdings include 420 shares of common stock acquired on July 31, 2007 and 459 shares of common stock acquired on January 31, 2008 pursuant to the Company's 2004 Employee Stock Purchase Plan Madelaine Salas by Power of Attorney 2008-02-13