EXHIBIT 23

Consent of Independent Registered Public Accounting Firm

The Board of Directors
Cascade Microtech, Inc.

We consent to the incorporation by reference in the registration statement (No. 333-121964) on Form S-8 of Cascade Microtech, Inc. of our report dated March 15, 2006 with respect to the consolidated balance sheets of Cascade Microtech, Inc. as of December 31, 2005 and 2004 and the related consolidated statements of operations, redeemable stock, shareholders’ equity and comprehensive income (loss), and cash flows, for each of the years in the three-year period ended December 31, 2005, and the related financial statement schedule, management’s assessment of the effectiveness of internal control over financial reporting as of December 31, 2005 and the effectiveness of internal control over financial reporting as of December 31, 2005, which reports appear in the December 31, 2005 annual report on Form 10-K of Cascade Microtech, Inc.

/s/ KPMG LLP

Portland, Oregon

March 15, 2006