X0202 4 2005-09-01 0 0000864559 CASCADE MICROTECH INC CSCD 0001311552 Pence John 2430 N.W. 206TH AVENUE BEAVERTON OR 97006 0 1 0 0 VP/GM Engineering Products Div Common Stock 2005-09-01 4 S 0 275 13.01 D 25061 D Common Stock 2005-09-01 4 S 0 339 13.02 D 24722 D Common Stock 2005-09-01 4 S 0 674 13.04 D 24048 D Common Stock 2005-09-01 4 S 0 259 13.05 D 23789 D Common Stock 2005-09-01 4 S 0 1798 13.06 D 21991 D Common Stock 2005-09-01 4 S 0 1348 13.07 D 20643 D Common Stock 2005-09-01 4 S 0 1089 13.08 D 19554 D Common Stock 2005-09-01 4 S 0 52 13.09 D 19502 D Common Stock 2005-09-01 4 S 0 52 13.11 D 19450 D Common Stock 2005-09-01 4 S 0 259 13.17 D 19191 D Common Stock 2005-09-01 4 S 0 415 13.21 D 18776 D Common Stock 2005-09-01 4 S 0 207 13.23 D 18569 D Common Stock 2005-09-01 4 S 0 1826 13.24 D 16743 D Common Stock 2005-09-01 4 S 0 1020 13.25 D 15723 D Common Stock 2005-09-01 4 S 0 156 13.26 D 15567 D Common Stock 2005-09-01 4 S 0 1388 13.27 D 14179 D Common Stock 2005-09-01 4 S 0 741 13.30 D 13438 D Common Stock 2005-09-01 4 S 0 52 13.31 D 13386 D Common Stock 2005-09-01 4 S 0 758 13.32 D 12628 D Common Stock 2005-09-01 4 S 0 388 13.34 D 12240 D Common Stock 2005-09-01 4 S 0 1556 13.35 D 10684 D 682 shares acquired on 07/29/2005 pursuant to Employee Stock Purchase Plan Shares sold pursuant to existing 10(b)(5)-1 plan Madelaine Salas, by Power of Attorney 2005-09-07