Inventories (Tables)

12 Months Ended

Sep. 30, 2012

Inventories

Summary of major classes of inventories

	September 30,
	2011		2012
Raw materials	$	22,430	$	27,654
Work-in-process		136,227		129,642
Finished goods		90,386		104,875
Other		1,008		1,065
	$	250,051	$	263,236