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Long Term Debt (Details) (USD $)
3 Months Ended 9 Months Ended 3 Months Ended 1 Months Ended
Jun. 30, 2012
banks
Dec. 31, 2011
Jun. 30, 2012
banks
Jul. 02, 2011
Jun. 30, 2012
Maximum [Member]
Jun. 30, 2012
Minimum [Member]
May 31, 2011
MKS Inc [Member]
Jun. 30, 2012
MKS Inc [Member]
Sep. 30, 2011
MKS Inc [Member]
Debt Instrument [Line Items]                  
Revolving credit facility syndicate, number of participating banks 10   10            
Credit facility amount $ 300,000,000   $ 300,000,000            
Revolving credit facility additional borrowing limit 150,000,000                
Voting interest in foreign subsidiaries pledged against credit facility 65.00%                
Revolving credit facility, additional borrowings   40,000,000         250,000,000    
Repayments under the credit facility 60,000,000                
Borrowings outstanding               140,000,000 200,000,000
Repayment of line of credit   40,000,000 100,000,000 0          
Credit facility interest rate         1.625% 1.25%      
Credit facility, interest rate at period end 1.75%   1.75%            
Basis spread over base rate         0.625% 0.25%      
Basis spread on federal funds effective rate 0.005%                
Basis spread on adjusted LIBOR 1.00%                
Credit facility commitment fees percentage         0.30% 0.20%      
Investment limit in foreign subsidiaries 50,000,000   50,000,000            
Cash investment limit for acquisition of business $ 75,000,000   $ 75,000,000            
Maximum leverage ratio allowed under debt covenant 2.5   2.5            
Minimum fixed charge coverage ratio allowed under debt covenant 1.25   1.25            
Leverage ratio, actual 0.55   0.55            
Fixed charge coverage ratio, actual 4.24   4.24