X0202 4 2007-01-17 0000855182 IBIS TECHNOLOGY CORP IBIS 0001290630 Schmidt William J 129 CARLTON LANE NORTH ANDOVER MA 01845 0 1 0 0 Chief Financial Officer Common Stock 1.52 2007-01-17 4 A 0 30000 A 2017-01-17 Common Stock 30000 112000 D Options become exercisable on first, second and third anniversary dates of the option grant; one-third of the shares become exercisable on each date. Nothing to report Margaret A. Donovan, Power of Attorney 2007-01-19