X0202 4 2004-12-08 0000855182 IBIS TECHNOLOGY CORP IBIS 0001192389 BLAKE JULIAN G 13 HIGHLAND COURT GLOUCESTER MA 01930 0 1 0 0 VP of Engineering Common Stock 2004-11-30 5 A 0 430 2.159 A 20803 D Common Stock 2004-12-08 4 S 0 430 2.4604 D 20373 D Includes 1267 shares acquired under the Ibis Technology Corp. Employee Stock Purchase Plan in May 2004 and 430 shares acquired under the Ibis Technology Corp. Employee Stock Purchase Plan in November 2004. Margaret A. Donovan Power of Attorney 2004-12-10