X0202 4 2004-05-13 0000855182 IBIS TECHNOLOGY CORP IBIS 0001012113 TRAPANI COSMO S 8 HEATH CIRCLE LYNNFIELD MA 01940 1 0 0 0 Stock Option (Right to Buy) 7.20 2004-05-13 5 A 0 1250 A 2005-05-13 2014-05-13 Common Stock 1250 10000 D Options become exercisable in full immediately prior to the occurence of the next annual meeting of the Company's stockholders. Nothing to report Margaret A. Donovan, Power of Attorney, This Power of Attorney shall remain in full force and effect until Cosmo S. Trapani is no longer required to file Forms 3,4, and 5. 2004-05-17