X0202 4 2004-05-13 0000855182 IBIS TECHNOLOGY CORP IBIS 0001011302 MCGUINNESS DONALD F 101 OLD MAIN STREET NEW LONDON NH 03257 1 0 0 0 Stock Option (Right to Buy) 7.20 2004-05-13 5 A 0 1250 A 2005-05-13 2014-05-13 Common Stock 1250 11450 D Options become exercisable immediately prior to the occurence of the next annual meeting of the Company's stockholders. Nothing to report Margaret A. Donovan, Power of Attorney, This Power of Attorney shall remain in full force and effect until Donald F. McGuinness is no longer required to file Forms 3,4, and 5. 2004-05-17