X0202 4 2004-05-13 0000855182 IBIS TECHNOLOGY CORP IBIS 0001033362 LEWIS LESLIE B WATERMILL CENTER 800 SOUTH STREET, SUITE 355 WALTHAM MA 02453 1 0 0 0 Stock Option (Right to Buy) 7.20 2004-05-13 5 A 0 1250 A 2005-05-13 2014-05-13 Common Stock 1250 16250 D Options become exercisable immediately prior to the occurence of the next annual meeting of the Company's stockholders. Nothing to report. Margaret A. Donovan, Power of Attorney, This Power of Attorney shall remain in full force and effect until Leslie B. Lewis is no longer required to file Forms 3,4, and 5. 2004-05-17