X0201 42003-09-01 0000855182 IBIS TECHNOLOGY CORP IBIS 0001025085 REID MARTIN J 7 WAINRIGHT ROAD, UNIT 59 WINCHESTER MA 01890 1100President and CEOCommon Stock (right to buy)10.702003-09-014A06000A2013-09-01Common Stock6000296600DOptions become exercisable in full on the first anniversary date of the option grant.Nothing to report.Margaret A. Donovan, Power of Attorney2003-09-04