X0201 42003-08-26 0000855182 IBIS TECHNOLOGY CORP IBIS 0001192389 BLAKE JULIAN G 13 HIGHLAND COURT GLOUCESTER MA 01930 0100VP of EngineeringStock Option (right to buy)9.012003-08-264A04739A2013-08-26Common Stock4739120950DOptions become exercisable on the first and second anniversary dates of the option grant; one-half of the shares become exercisable on each date.Nothing to reportMargaret A. Donovan, Power of Attorney2003-08-29