X0202 4 2007-05-14 0 0000855182 IBIS TECHNOLOGY CORP IBIS 0001044321 MARXE AUSTIN W & GREENHOUSE DAVID M C/O SPECIAL SITUATIONS FUNDS 527 MADISON AVENUE, SUITE 2600 NEW YORK NY 10022 0 0 1 0 Common Stock 2007-05-14 4 P 0 1978367 1.5738 A 3378367 I By Limited Partnerships Warrants 1.5 2007-05-14 4 P 0 1483781 0.125 A 2007-05-14 2012-05-14 Common Stock 1483781 2533781 I By Limited Partnerships This is a joint filing by Austin W. Marxe (Marxe) and David M. Greenhouse (Greenhouse). They share voting and investment control over all securities owned by Special Situations Fund III QP, L.P. (QP), Special Situations Private Equity Fund, L.P. (PE), Special Situations Technology Fund, LP (Tech) and Special Situations Technology Fund II, L.P. (Tech II), respectively. 1,689,189 shares of Common Stock and 1,266,891 Wts are held by QP, 675,675 shares of Common Stock and 506,756 Wts are held by PE, 145,270 shares of Common Stock and 108,952 Wts are held by Tech and 868,233 shares of Common Stock and 651,182 Wts are held by Tech II. The interest of Marxe and Greenhouse in the shares of Common Stock and Warrants owned by QP, PE, Tech and Tech II is limited to the extent of his pecuniary interest. Austin W. Marxe 2007-05-16 David M. Greenhouse 2007-05-16