X0202 3 2007-02-20 0 0000855182 IBIS TECHNOLOGY CORP IBIS 0001044321 MARXE AUSTIN W & GREENHOUSE DAVID M C/O SPECIAL SITUATIONS FUNDS 527 MADISON AVENUE, SUITE 2600 NEW YORK NY 10022 0 0 1 0 Common Stock 1400000 I By Limited Partnerships Warrants 1.5 2007-02-20 2012-02-16 Common Stock 1050000 I By Limited Partnerships This is a joint filing by Austin W. Marxe (Marxe) and David M. Greenhouse (Greenhouse). They share voting and investment control over all securities owned by Special Situations Fund III QP, L.P. (QP), Special Situations Private Equity Fund, L.P. (PE), Special Situations Technology Fund, LP (Tech) and Special Situations Technology Fund II, L.P. (Tech II), respectively. 700,000 shares of Common Stock and 525,000 Wts are held by QP, 280,000 shares of Common Stock and 210,000 Wts are held by PE, 60,200 shares of Common Stock and 45,150 Wts are held by Tech and 359,800 shares of Common Stock and 269,850 Wts are held by Tech II. The interest of Marxe and Greenhouse in the shares of Common Stock and Warrants owned by QP, PE, Tech and Tech II is limited to the extent of his pecuniary interest. Austin W. Marxe 2007-03-01 David M. Greenhouse 2007-03-01