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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 QmSsC58oDUWFN3WLjK9Ex+yAOs+6ouMF/njwRhedN8uQpigdGrkzYNs38F0tpavC
 9tDJb4sL0J7nP3mfU30SnQ==

<SEC-DOCUMENT>9999999997-03-045708.txt : 20031229
<SEC-HEADER>9999999997-03-045708.hdr.sgml : 20031225
<ACCEPTANCE-DATETIME>20031229112101
<PAPER>
ACCESSION NUMBER:		9999999997-03-045708
CONFORMED SUBMISSION TYPE:	ARS
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20030830
FILED AS OF DATE:		20031223
EFFECTIVENESS DATE:		20031223

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			FSI INTERNATIONAL INC
		CENTRAL INDEX KEY:			0000841692
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				411223238
		STATE OF INCORPORATION:			MN
		FISCAL YEAR END:			0831

	FILING VALUES:
		FORM TYPE:		ARS
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-17276
		FILM NUMBER:		03043305

	BUSINESS ADDRESS:	
		STREET 1:		3455 LYMAN BLVD.
		CITY:			CHASKA
		STATE:			MN
		ZIP:			55318
		BUSINESS PHONE:		9524485440

	MAIL ADDRESS:	
		STREET 1:		3455 LYMAN BLVD.
		CITY:			CHASKA
		STATE:			MN
		ZIP:			55318
</SEC-HEADER>
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<TYPE>ARS
<SEQUENCE>1
<FILENAME>9999999997-03-045708.paper
<DESCRIPTION>AUTO-GENERATED PAPER DOCUMENT
<TEXT>
This document was generated as part of a paper submission.
Please reference the Document Control Number 03043305 for access to the original document.
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